21.15109/ARP/KZTIUB Lábár, János László(Centre for Energy Research) ARP 2025 hdl:21.15109/ARP/KZTIUB/DUJQCChdl:21.15109/ARP/KZTIUB/XRJOQPhdl:21.15109/ARP/KZTIUB/2EGD9Uhdl:21.15109/ARP/KZTIUB/FRK5YShdl:21.15109/ARP/KZTIUB/LDEKYOhdl:21.15109/ARP/KZTIUB/G4LUP1hdl:21.15109/ARP/KZTIUB/F24I1Thdl:21.15109/ARP/KZTIUB/YOZ7DLhdl:21.15109/ARP/KZTIUB/JGW9QYhdl:21.15109/ARP/KZTIUB/DJHMXShdl:21.15109/ARP/KZTIUB/9XQ2TIhdl:21.15109/ARP/KZTIUB/LQTN5Vhdl:21.15109/ARP/KZTIUB/LS0NDNhdl:21.15109/ARP/KZTIUB/SLOSP4hdl:21.15109/ARP/KZTIUB/7KDK67hdl:21.15109/ARP/KZTIUB/TEQPWVhdl:21.15109/ARP/KZTIUB/T13IHNhdl:21.15109/ARP/KZTIUB/EW7GMEhdl:21.15109/ARP/KZTIUB/VF2XMZhdl:21.15109/ARP/KZTIUB/QSWUXK We combined the previously published Strain4D-ED method with the new common sublattice method (CSM) to extend the applicability of the method to use lattice reference measured in the unstrained substrate (with one crystal structure) to determine local lattice deformations in an epitaxial layer (of another crystal structure). A key condition of applicability is that a common sublattice must exist, multiples of which can be (slightly differently) distorted to obtain the experimentally recorded lattices in both the substrate and the layer. Efficiency of the method is demonstrated on 3 (differently treated) samples of cubic gamma-Ga2O3 layer on a monoclinic beta-Ga2O3 substrate measured with different experimental parameters. Lábár, János László(Centre for Energy Research)